Development of Lensed Color Filter technology for higher SNR and lower crosstalk CMOS image sensor
نویسندگان
چکیده
To enhance SNR performance by reducing crosstalk in backside illumination (BSI) pixel structure of CMOS image sensor, a new process technology, named as ‘lensed color filter’, was developed. Effective color filter thickness is increased while optical height is lower than conventional structure. The real chip with 1.12um pixels and 12Mega resolution was manufactured. It has 25% higher color filter thickness and 15% lower optical stack. Evaluation shows that SNR10 performance is improved by 10% and crosstalk is reduced by 11%.
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